26.03.2001 17:00:00 CET

ASM Wins Two Key Selections for New 300mm Fabs: The A412™ Vertical Furnace and the Eagle-12™ Rapidfire™ PECVD tool with its low-k Aurora™ Process.

BILTHOVEN, THE NETHERLANDS, March 26, 2001 – ASM International N.V. (Nasdaq symbol ASMI and Euronext Stock Exchange in Amsterdam: symbol ASM) announced today that during the month of February 2001, the ASM Front-end operation received approval and selection from two of the world’s top 15 device manufacturers for their 300mm tools.

The first selection was for the A412™, a member of ASM’s successful Advance 400™ vertical furnace family. Orders are expected to be placed next quarter for delivery in early 2002. The productivity and process performance of the A412, as well as the availability of integrated metrology, was instrumental in ASM being selected as the vendor of choice.

The second selection was for the Eagle-12™ Rapidfire™, a 300mm version of the Eagle-10™ Trident™, ASM’s 200mm plasma enhanced CVD tool. The Rapidfire will be used for the deposition of low-k dielectric layers, which are used between the copper dual-damascene metallization. It was the performance characteristics and integration capability of the
Aurora 2.7™ film deposited by the Rapidfire, as well as ASM’s ultra low-k roadmap, that were the key factors in the pro-ASM customer choice. Shipment of the tools will start in early 2002.

Daniel Queyssac, President and COO of ASM Front-end Businesses, said, “These two wins confirm the competitive advantages and innovation afforded by ASM tools. We are very pleased that these customers selected ASM and our unique production solutions (UPS). We are equally pleased by the confirmation that Aurora 2.7™, our low-k CVD process, is being selected for 100nm applications due to its superior performance to other low-k dielectrics, including spin-on dielectrics. The A412 selection confirms that ASM’s design is the most efficient solution for the front-end-of-line applications (FEOL) in providing a clear roadmap capability for today’s and future 300mm fab lines.”


About ASM


ASM International is headquartered in Bilthoven, the Netherlands. ASM International's subsidiaries design, develop, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for the wafer-processing, assembly and packaging segments through their facilities in the United States, Europe, Japan and Asia. ASM International's common shares trade on the NASDAQ National Market under the symbol “ASMI” and on the Euronext Stock Exchange in Amsterdam under the symbol “ASM.” More information on ASM can be found on its website at http://www.asm.com


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Safe Harbor Statement under the U.S. Private Securities Litigation Reform Act of 1995: The statements regarding orders, earnings development and the effects of research and new products on ASM’s future, and other matters discussed in this statement, except for any historical data, are forward-looking statements. Forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to, economic conditions in the semiconductor industry, currency fluctuations, the timing of significant orders, market acceptance of new products, competitive factors, risk factors related to litigation and other risks indicated in filings from time to time with the SEC and Stock Exchange Authorities.

Contact:
Yinka Massally
Public Relations
+1 602-470-5829
yinka.massally@asm.com

MaryJo Dieckhaus
Investor Relations
+1 212-986-2900
ddandw@compuserve.com

Annemiek van Gijn
Public Relations
+ 31-30-2298411
annemiek.van.gijn@asm.com