18.04.2001 17:00:00 CET

ASM delivers its 400th epsilon® epitaxial tool

BILTHOVEN, THE NETHERLANDS, April 18, 2001 – ASM International N.V. (Nasdaq: ASMI; Euronext Amsterdam: ASM) announced today that its subsidiary, ASM America, who maintains one of the largest fleets of single-wafer semiconductor epitaxial processing tools in the world, has shipped over 400 Epsilon single wafer epitaxial tools.

The Epsilon is capable of performing advanced epitaxial processes such as Silicon Germanium, increasingly used to build high speed/low power integrated circuits for wireless and telecommunications equipment. The Epsilon family of epitaxial reactors finds widespread application in silicon integrated circuit manufacturing.
"We are very excited about passing this milestone in our installed base”, said Dr. Armand P. Ferro, Epitaxial Business Unit Manager at ASM. “The Epsilon single wafer epitaxial tools were introduced in 1987 and have since provided the device manufacturing industry with a cost-effective solution for its ever-increasing epitaxial technology demands. The Epsilon is unique in its ability to support a wide range of processes and production requirements in both the semiconductor device and wafer manufacturing markets. Recent deliveries of the Epsilon tool sized for 300mm are aimed at 100 nm and 70 nm generations of devices, including Silicon Germanium and other advanced epitaxy applications."


About ASM


ASM International N.V. is headquartered in Bilthoven, the Netherlands. ASM International’s subsidiaries design, manufacture and market equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing, assembly and packaging through their facilities in the United States, Europe, Japan and Asia. ASM International’s common stock shares trade on NASDAQ and on the Euronext Stock Exchange in Amsterdam under the symbol ASMI. Additional information can be found on ASM’s web site at http://www.asm.com


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Contact:
Yinka Massally
Public Relations
+1 602-470-5829
yinka.massally@asm.com

MaryJo Dieckhaus
Investor Relations
+1 212-986-2900
ddandw@compuserve.com

Annemiek van Gijn
Public Relations
+ 31-30-2298411
annemiek.van.gijn@asm.com