06.06.2001 19:01:09 CET
BILTHOVEN, The Netherlands - June 6, 2001 - ASM International N.V. (Nasdaq: ASMI and Euronext Stock Exchange in Amsterdam: ASM) today announced that it has filed a lawsuit in U.S. District Court in the Northern District of California against Genus, Inc. for patent infringement.
ASM charges Genus with infringing on two of the company's U.S. patents for Atomic Layer Deposition (ALD) technology originally developed by ASM. ASM markets the technology under the trade names Atomic Layer Chemical Vapor Deposition, Atomic Layer CVD(TM) and ALCVD(TM).
"ASM has always been very diligent about intellectual property ownership," said Daniel Queyssac, president and COO of ASM Front-End Businesses. "With the acquisition of Microchemistry in 1999, the company that invented ALD, ASM became the owner of very valuable intellectual property on ALD. ASM intends to vigorously defend its position as the ALD pioneer and protect the significant investment it has made by developing the technology and bringing it to market. With this suit, we intend to strictly enforce our intellectual property rights and we expect to prevail."
ASM owns an extensive portfolio of intellectual property in ALD technology. The two ASM patents mentioned in the lawsuit are U.S. Patent No. 6,015,590 and 5,916,365. Patent No. 6,015,590 is a patent on ALD technology that enabled commercialization of ALD for microelectronics applications. The second patent, Patent No. 5,916,365, extends ALD technology to ALD using plasma.
ALD is a new process that allows the deposition of a variety of materials one layer at a time. ALD is forecasted to be an enabling technology for the 100 nm and below process nodes, which will make the construction of next-generation electronic products possible.
ASM Microchemistry, a subsidiary of ASM International, develops and manufactures ALCVD films for the latest as well as future semiconductor device designs.
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Contact:
Yinka Massally
Public Relations
+1 602-470-5829
yinka.massally@asm.com
MaryJo Dieckhaus
Investor Relations
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ddandw@compuserve.com
Lies Rijnveld
Corporate Headquarters
+ 31-30-2298506
lies.rijnveld@asm.com